منابع مشابه
cw laser annealing of Nb3AI and Nb3Si
cw laser annealing has been applied to synthesize the metastable A 15 superconductors, Nb3AI and Nb3Si. Qualitative agreement with the equilibrium phase diagrams have been obtained for the Nb-AI system. Laser annealing permits the high-temperature A15 phase to be fast quenched to room temperature without decomposition. Subsequent use of multiple low-temperature laser scans raises the supercondu...
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This paper describes a one-dimensional model of excimer laser-annealing of amorphous silicon layers which are irradiated with a pulsed KrF excimer laser. For realisation of the model in COMSOL Multiphysics, the application mode heat transfer in solids is used. The model predicts a melt threshold for the energy density of the laser of Eth = 88.5 mJ/cm. It also predicts a linear increase of the m...
متن کاملSuper-resolution in laser annealing and ablation
This letter reports observation of ablated holes as small as 0.7 mm fabricated by single 25 ns pulses of KrF (l5248 nm) laser focused onto a 5.6 mm spot. Samples with high thermal conductivity films with respect to that of the substrate ~Si/silica, Al/glass! repeatedly showed considerable reduction in the size of the ablated spot ~0.7and 1.2-mm-diam holes, respectively!. This letter also presen...
متن کاملDense-plasma Dynamics during Pulsed Laser Annealing
The flow of energy from the laser to the lattice during pulsed laser annealing of Si is examined, with particular attention paid to the influence of the dense'plasma of hot, photoexcited carriers on-the manner in which this energy transfer occurs. Consideration of carrier thermalization and recombination at high carrier densities suggests that under certain conditions carrier diffusion may incr...
متن کاملPrecision Laser Annealing of Focal Plane Arrays
We present results from laser annealing experiments in Si using a passively Q-switched Nd:YAG microlaser. Exposure with laser at fluence values above the damage threshold of commercially available photodiodes results in electrical damage (as measured by an increase in photodiode dark current). We show that increasing the laser fluence to values in excess of the damage threshold can result in an...
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ژورنال
عنوان ژورنال: The Review of Laser Engineering
سال: 1983
ISSN: 0387-0200,1349-6603
DOI: 10.2184/lsj.11.649